週次 |
日期 |
單元主題 |
Week 1 |
2/17 |
Course Introduction,
Critical Points to Design a High-Tech Fab in Nano Era
|
Week 2 |
2/24 |
Fundamentals of IC Manufacturing Processes |
Week 3 |
3/03 |
Fab Economics and High-tech Facilities Overview |
Week 4 |
3/10 |
Vibration and EMI, and Mitigation Airborne Molecular Contamination |
Week 5 |
3/17 |
Term Project Kickoff and 3D/CAD Introduction |
Week 6 |
3/24 |
Site Master Planning and Code Compliance for Semiconductor Facilities |
Week 7 |
3/31 |
A Fab Project and Conceptual Design Process |
Week 8 |
4/07 |
No Midterm Exam, Substitute with Mandatory Field Trip on 5/14 at Taichung |
Week 9 |
4/14 |
Fab Layout and Automated Material Handling System. |
Week 10 |
4/21 |
30% Design Review |
Week 11 |
4/28 |
Building and Structure Design |
Week 12 |
5/5 |
UPW, Gases and Chemical System Design.
Experiential Learning from TSMC Facility Academy at Taichung will be held on May, 14, 2022, Saturday |
Week 13 |
5/12 |
Electrical and HVAC and Cleanroom Design |
Week 14 |
5/19 |
Waste Recycling and Green Manufacturing |
Week 15 |
5/26 |
Group Term Project Presentation
(Final 100% Design Review)
|
Week 16 |
6/02 |
Final Exam |